Low-Energy Ion Scattering (LEIS) is an analytical tool that provides information on the atomic composition of the sample surface, when noble gas ions are used as projectiles. It is one of the most surface sensitive materials characterization techniques. The information on the surface composition is originated from the signal of backscattered ions, typically from 100 eV up to 3 keV He+, Ar+ or Ne+, makes possible to determine the composition exactly of the topmost one atomic layer.

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